• Packaging
• Micro and Nanotechnology

The combination of micromechanics and microelectronics in micro-systems (MEMS), with many sensors and actuators, requires similar technologies and process stages to those found in semiconductor systems.

Our systems and processes are commonplace on the MEMS market. Our mini-batch horizontal E 1200 systems meet special requirements, such as different wafer sizes, thicker or thinner substrates than those usually employed in the standard semiconductor industry, while smaller batch sizes are also managed competently.

In addition, we focus on new nanotechnology processes, such as the manufacture of films and the processing of carbon nano tubes and various nanostructures (nanodots, nanowires, nanobelts).