Verticoo 200
Vertical system for mass production
Designed for high volume production with a maximum throughput rate and a high degree of flexibility, the verticoo 200 is suitable for all standard atmospheric and low pressure CVD processes. The single tube set-up with dual boat logistics is optimized for minimum handling time as well as low cost of ownership with low maintenance costs.
- Up to 150 process wafers per batch
- Auto alignment
- Dual boat logistics
- Water cooled heating cassette
- Small footprint
- Side by side installation possible
Applications
- Annealing
- Diffusion
- LPCVD
- Oxidation
Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.
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