E 2000
Horizontal furnace for mass production
centrotherm E 2000, specially designed for series production, is an exceptional solution on account of its high process performance, maximum throughput, low maintenance costs and small footprint. The furnace offers flexible process capability and contains up to 4 stacked quartz or SiC tube process chambers for wafer sizes up to 300 mm.
- Atmospheric, PECVD and LPCVD processes
- Process selectable chamber options available
- Advanced water cooling system guarantees no thermal interference between the different process tubes
- Optional: automated boat loading
- Modular component design for ease of installation and start up in clean room facilities
Applications
- Annealing
- Diffusion
- LPCVD
- Oxidation
- PECVD
Note: centrotherm photovoltaics AG reserves the right to make changes in the product specifications at any time and without notice.
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