Contact
centrotherm thermal solutions GmbH & Co. KG
Johannes-Schmid-Strasse 8
89143 Blaubeuren
Germany
T +49 (0) 7344 9186-0
F +49 (0) 7344 9186-387
E-Mail
Turnkey solutions and systems for the semiconductor industry
As a successful, globally-operating company in the semiconductor industry, we develop and produce high-tech production systems for the manufacture of a wide range of semiconductor components. Our experienced team of highly qualified process engineers ensures that stringent process quality standards are constantly met and also guarantees the continuous development and innovation of processes.
In addition to the processes and technology, centrotherm’s core field of expertise also covers the construction and design of our products. They are used in a wide range of thermally-activated processes in various technologies and applications (e.g. power semiconductors, LEDs, micromechanics, MEMS, sensor technology).
Our product portfolio includes horizontal and vertical furnaces and vacuum soldering systems. We supply systems for standard processes, with temperatures ranging from 300°C to 1,100°C, as well as systems for high-temperature processes of up to 1,250°C (Si-technologies) and up to 1,850°C (SiC technologies).
We deploy technologies for atmospheric processes (e.g. tempering, oxidation, diffusion) and vacuum processes (e.g. silicon-nitride, polysilicon). This provides us with a high degree of flexibility to meet our customers’ individual requirements.
Our systems’ high quality standards enable toxic gases to be handled safely. Plasma energy (RF and microwave) can be used in the PECVD process to apply films at low temperatures in our horizontal and vertical systems.
We also provide engineering services and service offerings.
